公开(公告)号：US20170314127A1

公开(公告)日：2017-11-02

申请号：US15653166

申请日：2017-07-18

Applicant: Epistar Corporation

Inventor： Yuan-Hung HUANG ,  Chung-Kuei HUANG ,  Ai-Fa LEE ,  Shang-Po CHIEN ,  Meng-Tu CHIANG ,  Chi-Ling LEE ,  Ying-Chun CHUANG ,  Wen-Hsien LO

IPC: C23C16/458

CPC classification number: C23C16/4585

Abstract: A susceptor is provided. The susceptor comprises: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring, wherein the outer ring comprises multiple sub-elements separated from each other and detachably connected to the base part; wherein the inner ring and the outer ring separate the holders from one another, and the inner ring comprises multiple first extensions each protruding outwardly toward the outer ring, and each sub-element comprises a second extension extending inwardly toward the inner ring.

公开(公告)号：US20150345016A1

公开(公告)日：2015-12-03

申请号：US14790631

申请日：2015-07-02

Applicant: Epistar Corporation

Inventor： Yuan-Hung HUANG ,  Chung-Kuei HUANG ,  Ai-Fa LEE ,  Shang-Po CHIEN ,  Meng-Tu CHIANG ,  Chi-Ling LEE ,  Ying-Chun CHUANG ,  Wen-Hsien LO

IPC: C23C16/458

CPC classification number: C23C16/4585

Abstract: A susceptor, comprising: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring; wherein the inner ring and the outer ring separate the holders from one another.A susceptor, comprising: a base part; multiple holders distributed on the base part for accommodating wafers; a cover comprising a first surface facing the base part, and a second surface opposite to the first surface; a first positioning structure; a second positioning structure formed in the first surface; and a third positioning structure formed in the base part, wherein the cover connects to the base part by associating the first positioning structure with the second positioning structure and the third positioning structure.

Abstract translation: 一种感受器，包括：基部; 多个保持器分布在基部上以容纳晶片; 连接到基部的内圈; 以及外圈，其可拆卸地连接到所述基部并与所述内圈分离; 其中所述内环和所述外环将所述保持器彼此分开。 一种感受器，包括：基部; 多个保持器分布在基部上以容纳晶片; 包括面向所述基部的第一表面和与所述第一表面相对的第二表面的盖; 第一定位结构; 形成在所述第一表面中的第二定位结构; 以及形成在所述基部中的第三定位结构，其中所述盖通过将所述第一定位结构与所述第二定位结构和所述第三定位结构相关联而连接到所述基部。