公开(公告)号：EP3809447A1

公开(公告)日：2021-04-21

申请号：EP20201669.7

申请日：2020-10-14

Applicant: FEI Company

Inventor： Rue, Chad ,  Wang, Jing ,  Botman, Aurélien Philippe Jean Maclou ,  Christian, Joseph ,  Mani, Kenny ,  Kiss, Gabriella

IPC: H01J37/305 ,  G01N1/28 ,  G01N1/32

Abstract: Methods and apparatuses disclosed herein for large-area 3D analysis of samples using glancing incidence FIB milling. An example method at least includes milling, with a focused ion beam, a sample at a shallow angle and at a plurality of rotational orientations to remove a layer of the sample and to expose a surface, and after milling, imaging, with a charged particle beam, the exposed surface of the sample.