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1.发明申请METHOD AND MEASURING DEVICE FOR MEASURING THE DISTANCE OF A SURFACE, THICKNESS AND OPTICAL PROPERTIES OF AN OBJECT 审中-公开用于测量物体的距离，物体的厚度和光学性质的方法和测量装置
公开(公告)号：WO2014041254A1
公开(公告)日：2014-03-20
申请号：PCT/FI2013/050898
申请日：2013-09-17
Applicant: FOCALSPEC OY
Inventor： KERÄNEN, Heimo
CPC classification number: G01C3/08 , G01B9/02091 , G01B11/0633 , G01B11/0691 , G01B2210/50 , G01N21/47 , G01N21/49 , G01N21/57 , G01N21/8422
Abstract: In the measuring device (1 ) and measuring method according to the invention, confocal measuring principle is utilized. A certain component of an optical measurement signal is, from the point of view of both illumination and imaging, in focus only at one point on the virtual measuring surface (3). In the measuring device, the surface (2a) to be measured always hits a common focus point of the illumination and imaging, whereby a reflection is generated. The reflected optical signal is direct to a detector (13) belonging to the imaging means, where one picture element of the detector corresponds a certain focus point, respectively. The optical efficiency received by each picture element is indicated. The light reflecting from the intersection of the virtual measuring surface (3) and the surface (2a) of the object (2) produces an intensity maximum for the detector. This maximum point is indicated and converted in the imaging unit (13) into the height of the surface (2a) of the object (2). By means of the intensity distribution measured in the vicinity of this maximum point further the optical reflection characteristics of the surface can be determined.
Abstract translation: 在根据本发明的测量装置（1）和测量方法中，利用共焦测量原理。 从照明和成像的角度来看，光学测量信号的某个分量仅在虚拟测量表面（3）上的一个点处聚焦。 在测量装置中，要测量的表面（2a）总是碰到照明和成像的公共焦点，从而产生反射。 反射的光信号直接属于成像装置的检测器（13），其中检测器的一个像素分别对应于某个焦点。 指示由每个像素接收的光学效率。 从虚拟测量表面（3）和物体（2）的表面（2a）的交点反射的光产生检测器的强度最大值。 将该最大点在成像单元（13）中指示和转换成物体（2）的表面（2a）的高度。 通过在该最大点附近测量的强度分布，可以确定表面的光学反射特性。
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2.发明授权
公开(公告)号：EP2486392B1
公开(公告)日：2019-06-05
申请号：EP10821623.5
申请日：2010-10-07
Applicant: Focalspec Oy
Inventor： NIEMELÄ, Karri , KERÄNEN, Heimo
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3.发明公开METHOD AND MEASURING DEVICE FOR MEASURING THE DISTANCE OF A SURFACE, THICKNESS AND OPTICAL PROPERTIES OF AN OBJECT 审中-公开方法和测量器具，用于测量表面的距离，厚，光学性质的物体
公开(公告)号：EP2901102A1
公开(公告)日：2015-08-05
申请号：EP13837251.1
申请日：2013-09-17
Applicant: Focalspec Oy
Inventor： KERÄNEN, Heimo
CPC classification number: G01C3/08 , G01B9/02091 , G01B11/0633 , G01B11/0691 , G01B2210/50 , G01N21/47 , G01N21/49 , G01N21/57 , G01N21/8422
Abstract: In the measuring device (1 ) and measuring method according to the invention, confocal measuring principle is utilized. A certain component of an optical measurement signal is, from the point of view of both illumination and imaging, in focus only at one point on the virtual measuring surface (3). In the measuring device, the surface (2a) to be measured always hits a common focus point of the illumination and imaging, whereby a reflection is generated. The reflected optical signal is direct to a detector (13) belonging to the imaging means, where one picture element of the detector corresponds a certain focus point, respectively. The optical efficiency received by each picture element is indicated. The light reflecting from the intersection of the virtual measuring surface (3) and the surface (2a) of the object (2) produces an intensity maximum for the detector. This maximum point is indicated and converted in the imaging unit (13) into the height of the surface (2a) of the object (2). By means of the intensity distribution measured in the vicinity of this maximum point further the optical reflection characteristics of the surface can be determined.
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