Abstract:
PROBLEM TO BE SOLVED: To provide an insulating substrate that provides a semiconductor package and an LED package excellent in all of insulation and heat dissipation, and a wiring substrate, a semiconductor package, and an LED package each using the insulating substrate.SOLUTION: The insulating substrate 1 includes an aluminum substrate 2 and an insulating layer 3 provided at least a part of the surface of the aluminum substrate 2, wherein the insulating layer 3 is an anodized coating of aluminum. The anodized coating includes an insulating region A with a film thickness (T) of 20 nm-80 μm and an insulating region B with a film thickness (T) of 2-1,000 μm, and a ratio (TT) of the film thickness of the insulating region A to the film thickness of the insulating region B is 2-2,000.
Abstract translation:要解决的问题:提供一种绝缘基板,其提供绝缘和散热全部优异的半导体封装和LED封装,以及各自使用绝缘基板的布线基板,半导体封装和LED封装。 解决方案:绝缘基板1包括铝基板2和设置在铝基板2的表面的至少一部分上的绝缘层3,其中绝缘层3是铝的阳极氧化涂层。 阳极氧化涂层包括具有20nm-80μm的膜厚度(T A SB>)的绝缘区域A和膜厚度(T B SB>),以及比例(T B / SB> T A SB>) 绝缘区域A的膜厚与绝缘区域B的膜厚度为2-2000。 版权所有(C)2013,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal filling fine structure having high filling factor of a metal to micropores provided in an insulating base material and preventing the occurrence of warpage of the fine structure due to the residual stress accompanying the filling of the metal.SOLUTION: The method of manufacturing a metal filling fine structure has: a step of filling the metal into through-holes in the insulating base material provided with the through-holes 101, 102 and the like having 10-5,000 nm average opening diameter, 10-1,000 μm average depth and 1×10-1×10/mmdensity by electroplating so that the virtual filling factor of the metal to the through-holes is larger than 100%; and a step of removing the metal stuck to the surface of the insulating base material, wherein the electroplating is carried out so that the difference of the crystal particle diameter of the metal filled into the inside of the through-holes and the crystal particle diameter of the metal stuck to the surface of the insulating base material is controlled to ≤20 nm.
Abstract:
PROBLEM TO BE SOLVED: To provide an anisotropic conductive member that significantly increases the installation density of conductive paths, suppresses the formation of defect regions in conductive paths, and can be used as an electrically connecting member, an inspection connector or the like for electronic components such as semiconductor devices even today when still higher levels of integration is achieved.SOLUTION: In an anisotropic conductive member 1, a plurality of conductive paths 3 comprising a conductive material filled in through-holes are provided in an insulating base material 2 having the through-holes such that the conductive paths penetrate through the insulating base material in the thickness direction in a state where the conductive paths are insulated from one another, while one end of each of the conductive paths is exposed on one face of the insulating base material, and the other end of each of the conductive paths is exposed on the other face of the insulating base material. The insulating base material is an anodic oxide film obtained from an aluminum substrate and the aluminum substrate contains an intermetallic compound having an average circle equivalent diameter of 2 μm or less and a density of 100 pieces/mmor less.
Abstract:
PROBLEM TO BE SOLVED: To improve heat radiation performance of a semiconductor package manufactured by using an anisotropic conductive member.SOLUTION: A multilayer substrate includes: an anisotropic conductive member including an insulation base material which is an anodic oxidation coating of an aluminium substrate and is provided with through holes formed in a thickness direction and multiple conduction passages which are made of a conductive material filling the through holes and penetrate through the insulation base material in the thickness direction while being insulated from each other; a heat conduction layer having a heat conduction part provided on at least one surface of the anisotropic conductive member; and a heat radiation part protruding from the insulation base material and made of the conductive material.
Abstract:
PROBLEM TO BE SOLVED: To provide a metal-filled structure that is an anisotropic conductive member excellent in light transmissivity or excellent in heat transfer properties and heat dissipation properties and that is applicable to various applications.SOLUTION: The metal-filled structure includes: a portion having a through-hole A penetrating in the thickness direction with an average diameter of 10-1,000 nm; and a portion having a through-hole B penetrating in the thickness direction with an average diameter of 100 nm-1 mm, in a structure comprising an inorganic insulating substrate, wherein the ratio of the average diameter of the through-hole A to the average diameter of the through-hole B is 5 or more, the density of the through-hole A is 1×10to 1×10pieces/mm, the depth of the through-hole A is 50-1,000 μm, and a part of or all of any one of the through-hole A and the through-hole B or a part of or all of both of the through-hole A and the through-hole B are filled with metal.
Abstract:
PROBLEM TO BE SOLVED: To provide an anisotropic conductive member which is excellent in uniformity in height at a protrusion portion of a conductive path with a resistance change rate being low, and its manufacturing method.SOLUTION: In an insulating base material, a plurality of conductive paths made from conductive member are provided in such a manner as penetrates the insulating base material in thickness direction while insulated from each other, with one end of each conductive path being protruding from one surface of the insulating base material while the other end being protruding from the other surface of the insulating base material. The density of the conductive path is 2,000,000/mmor higher. The insulating base material is such an anisotropic conductive member as made from a positive electrode oxide film of aluminium substrate containing micropore, with a ratio (protruding part/penetrating part) of average diameter at a portion protruding from the surface of an insulating layer base material at the conductive path and average diameter at a portion penetrating the insulating layer base material at the conductive path, being 1.05 or higher.
Abstract:
PROBLEM TO BE SOLVED: To obtain a microstructure which can provide an anisotropic conductive member capable of minimizing poor wiring, and to provide a method of manufacturing the same.SOLUTION: In the microstructure where through holes provided in an insulating substrate are filled with a metal and an insulating material, density of the through holes in the insulating substrate is 1×10-1×10/mm, average opening diameter of the through holes is 10-5000 nm, average depth of the through holes is 10-1000 μm, sealing rate of the through holes only by the metal is 80% or more, sealing rate of the through holes by the metal and insulating substrate is 99% or more, and the insulating substrate is at least one kind selected from a group consisting of aluminum hydroxide, silicon dioxide, metal alkoxide, lithium chloride, titanium oxide, magnesium oxide, tantalum oxide, niobium oxide, and zirconium oxide.
Abstract:
PROBLEM TO BE SOLVED: To provide a metal-filled fine structure which has reduced warpage, high mechanical strength and enhanced flatness, and to provide a method for producing the same. SOLUTION: The metal-filled fine structure includes: a penetration structure which is formed of an insulative substrate having through-holes with pore diameters of 10-5,000 nm and a depth of 50-1,000 μm in a density of 1×10 6 to 1×10 10 /mm 2 ; and a metal which is filled in the inner part of the through-hole down to the depth of 80% or more of the depth of the through-hole. The method for producing the same is also disclosed. COPYRIGHT: (C)2011,JPO&INPIT