Micro-oscillation element and array of micro-oscillation elements
    1.
    发明公开
    Micro-oscillation element and array of micro-oscillation elements 有权
    Mikrooszillationselement

    公开(公告)号:EP2008964A2

    公开(公告)日:2008-12-31

    申请号:EP08158155.5

    申请日:2008-06-12

    Abstract: A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.

    Abstract translation: 微振荡元件包括基架,振荡部分和将基架与振荡部分相互连接的连接部分。 振荡部具有可动功能部,与可动功能部连接的第一驱动电极和与第一驱动电极接合的配重部。 连杆部分限定摆动部分的摆动运动的轴线。 固定在基架上的第二驱动电极与第一驱动电极协作产生用于振荡运动的驱动力。

    Micro oscillating device and mircro oscillating device array
    4.
    发明授权
    Micro oscillating device and mircro oscillating device array 有权
    微振荡器件和微振荡器件阵列

    公开(公告)号:EP1975674B1

    公开(公告)日:2011-05-11

    申请号:EP08103114.8

    申请日:2008-03-28

    CPC classification number: G02B26/0841 B81B3/0086 B81B2201/033 B81B2201/047

    Abstract: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

    Micro-oscillation element and array of micro-oscillation elements
    5.
    发明公开
    Micro-oscillation element and array of micro-oscillation elements 有权
    微振荡元件和微振荡元件阵列

    公开(公告)号:EP2008964A3

    公开(公告)日:2010-08-25

    申请号:EP08158155.5

    申请日:2008-06-12

    Abstract: A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.

    Abstract translation: 微振动元件包括基架,振荡部分以及将基架和振荡部分彼此连接的连接部分。 振动部分具有可移动功能部分,连接到可移动功能部分的第一驱动电极以及连接到第一驱动电极的配重部分。 连杆部分限定了摆动部分的摆动运动的轴线。 固定在底座上的第二驱动电极与第一驱动电极协同产生振荡运动的驱动力。

    Semiconductor device, cooling device, and cooling device fabrication method
    7.
    发明公开
    Semiconductor device, cooling device, and cooling device fabrication method 审中-公开
    Halbleitervorrichtung,KühlvorrichtungundKühlvorrichtungsherstellungsverfahren

    公开(公告)号:EP2466637A2

    公开(公告)日:2012-06-20

    申请号:EP11184750.5

    申请日:2011-10-11

    Abstract: A semiconductor device includes a semiconductor chip having an electric circuit; and a cooling device including at least one channel serving as a flow path through which coolant flows, an external surface including projections, and a metallic layer formed over the external surface including the projections. In the semiconductor device, the projections of the external surface of the cooling device are brought into contact with a first surface of the semiconductor chip via the metallic layer such that the semiconductor chip is cooled by allowing the coolant to flow through the channel formed in the cooling device.

    Abstract translation: 半导体器件包括具有电路的半导体芯片; 以及冷却装置,其包括用作冷却剂流过的流路的至少一个通道,包括突起的外表面和形成在包括突起的外表面上的金属层。 在半导体装置中,冷却装置的外表面的突起经由金属层与半导体芯片的第一表面接触,使得半导体芯片通过允许冷却剂流过形成在 冷却装置。

    Micro oscillating device and mircro oscillating device array
    8.
    发明公开
    Micro oscillating device and mircro oscillating device array 有权
    维克里斯坦

    公开(公告)号:EP1975674A2

    公开(公告)日:2008-10-01

    申请号:EP08103114.8

    申请日:2008-03-28

    CPC classification number: G02B26/0841 B81B3/0086 B81B2201/033 B81B2201/047

    Abstract: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

    Abstract translation: 微振荡装置包括框架,包括用于施加参考电位的第一驱动电极的振荡部分和用于将框架和振荡部分彼此连接的连接部分,其中连接部分限定摆动轴线 摆动部分的运动。 第二驱动电极固定到框架以与第一驱动电极协作以产生用于振荡运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端延伸部和第二端部延伸部。 第二驱动电极在第一和第二端部延伸部之间的间隔距离内。

    Micro oscillating device and mircro oscillating device array
    10.
    发明公开
    Micro oscillating device and mircro oscillating device array 有权
    微振荡器件和微振荡器件阵列

    公开(公告)号:EP1975674A3

    公开(公告)日:2010-01-20

    申请号:EP08103114.8

    申请日:2008-03-28

    CPC classification number: G02B26/0841 B81B3/0086 B81B2201/033 B81B2201/047

    Abstract: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.

    Abstract translation: 微振荡装置包括框架,包括用于施加参考电势的第一驱动电极的振荡部分以及用于将框架和振荡部分彼此连接的连接部分,其中连接部分限定振荡的轴线 摆动部分的运动。 第二驱动电极固定在框架上以与第一驱动电极配合以产生用于摆动运动的驱动力。 第一驱动电极包括彼此分离并沿与轴线交叉的方向延伸的第一端延伸部和第二端延伸部。 第二驱动电极在第一和第二端部延伸部之间的分隔距离内。

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