公开(公告)号：US20160191011A1

公开(公告)日：2016-06-30

申请号：US14650658

申请日：2013-12-13

Applicant: GENERAL ELECTRONIC COMPANY

Inventor： Russell CRADDOCK ,  Roger JONES ,  Li ZHAO ,  Muhammad IRSHAD

IPC: H03H9/02 ,  H03H3/02 ,  H03H3/007 ,  G01L1/10 ,  G01P15/02

CPC classification number: H03H9/02244 ,  G01K7/32 ,  G01L1/103 ,  G01L9/002 ,  G01L9/0077 ,  G01L19/0092 ,  G01L19/04 ,  G01P15/02 ,  H03H3/0072 ,  H03H3/02

Abstract: A resonator device 10 is disclosed. The resonator device may be used in a transducer or a sensor such as a pressure, force or acceleration sensor. The resonator device comprises a resonator 20 provided on a diaphragm 30. A cap 40 is provided which may be fusion bonded to the diaphragm 30 to enclose the resonator 20 and form a hermetically sealed package 10. The resonator device is excited by applying electromagnetic stimulation, such as infra-red or optical stimulation, which may be from a laser via a fibre 50. The resonator device may be interrogated by applying an electromagnetic signal into the optical cavity formed between the resonator 20 and the inside surface of the cap 40 to derive a frequency change of the resonator. As the resonator device incorporates a hermetically sealed package and is stimulated by electromagnetic radiation, it is robust and able to operate in harsh environments.

Abstract translation: 公开了一种谐振器装置10。 谐振器装置可以用在换能器或诸如压力，力或加速度传感器的传感器中。 谐振器装置包括设置在隔膜30上的谐振器20.设置盖40，其可以熔接到隔膜30以包围谐振器20并形成气密密封的封装10.通过施加电磁刺激来激发谐振器装置， 例如红外或光学刺激，其可以来自经由光纤50的激光。可以通过将电磁信号施加到形成在谐振器20和盖40的内表面之间的光学腔中来询问谐振器装置，以导出 谐振器的频率变化。 由于谐振器装置包含密封的封装并且被电磁辐射刺激，所以它是坚固的并且能够在恶劣的环境中操作。