FILTER AND TARGET SUPPLY APPARATUS
    1.
    发明申请
    FILTER AND TARGET SUPPLY APPARATUS 审中-公开
    过滤器和目标供应装置

    公开(公告)号:US20160227637A1

    公开(公告)日:2016-08-04

    申请号:US14992477

    申请日:2014-06-13

    Abstract: A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area.

    Abstract translation: 过滤器可以包括:具有设置有通道的第一表面的第一构件; 以及第二构件,其具有覆盖所述通道的第二表面。 第一构件可以包括第一可通过部分,其允许流体在通道的第一区域之间在第一表面和限定在与第一表面相对的第一构件的表面旁边的第一空间之间通过。 第二构件可以包括第二可通过部分,其允许流体在第二表面和第二空间之间通过,第二空间限定在与第二表面相对的第二构件的表面旁边,通过与第二空间相距的通道的第二区域 第一区。

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