公开(公告)号：US20240159658A1

公开(公告)日：2024-05-16

申请号：US18451672

申请日：2023-08-17

Applicant: GIST(Gwangju Institute of Science and Technology)

Inventor： Young Dahl JHO ,  Sehyuk LEE ,  Sang-Hyuk PARK

IPC: G01N21/25

CPC classification number: G01N21/255 ,  G01N2201/06113 ,  G01N2201/066 ,  G01N2201/126

Abstract: The present disclosure relates to an apparatus for evaluating thermal conductance of an interface on the basis of how much the phases of acoustic phonons, which are produced in a semiconductor, change on a semiconductor interface. The apparatus for evaluating thermal conductance of a semiconductor interface according to an embodiment of the present disclosure includes: a spectrometer exciting acoustic phonons in a semiconductor by irradiating a laser beam to the semiconductor; and a processor evaluating thermal conductance of an interface of the semiconductor in accordance with a phase difference of a ascending acoustic phonon propagating toward the interface and reflecting from the interface and a descending acoustic phonon propagating in an opposite direction to the interface.