公开(公告)号：EP3185282B1

公开(公告)日：2018-08-29

申请号：EP17155850.5

申请日：2014-04-29

Applicant: GLOBALFOUNDRIES INC.

Inventor： Miner, Stephen Bradley ,  Fosnight, William John ,  Gallagher, Ryan

IPC: H01L21/67 ,  H01L21/68 ,  B25J19/02

CPC classification number: H01L21/67265 ,  G05B19/4184 ,  G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  H01L21/67259 ,  H01L21/67389 ,  H01L21/68 ,  H01L21/68707 ,  Y02P90/04 ,  Y10S901/02 ,  Y10S901/27

Abstract: Systems, machines, and methods for monitoring wafer handling are disclosed herein. A system for monitoring wafer handling includes a sensor and a controller. The sensor is capable of being secured to an assembled wafer handling machine. The controller is in electronic communication with the sensor and includes control logic. The control logic is configured to store a reference output of the sensor when the wafer handling machine is aligned and is configured to generate an indication signal when a difference between the reference output and a current output of the sensor exceeds a threshold.

公开(公告)号：EP2800132A1

公开(公告)日：2014-11-05

申请号：EP14166341.9

申请日：2014-04-29

Applicant: GlobalFoundries, Inc.

Inventor： Miner, Stephen Bradley ,  Fosnight, William John ,  Gallagher, Ryan

IPC: H01L21/67 ,  H01L21/68 ,  B25J19/02

CPC classification number: H01L21/67265 ,  G05B19/4184 ,  G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  H01L21/67259 ,  H01L21/67389 ,  H01L21/68 ,  H01L21/68707 ,  Y02P90/04 ,  Y10S901/02 ,  Y10S901/27

Abstract: Systems, machines, and methods for monitoring wafer handling are disclosed herein. A system for monitoring wafer handling includes a sensor and a controller. The sensor is capable of being secured to an assembled wafer handling machine. The controller is in electronic communication with the sensor and includes control logic. The control logic is configured to store a reference output of the sensor when the wafer handling machine is aligned and is configured to generate an indication signal when a difference between the reference output and a current output of the sensor exceeds a threshold.

Abstract translation: 本文公开了用于监测晶片处理的系统，机器和方法。 用于监测晶片处理的系统包括传感器和控制器。 传感器能够被固定到组装的晶片处理机上。 控制器与传感器进行电子通信，并包括控制逻辑。 所述控制逻辑被配置为当所述晶片处理机对准时存储所述传感器的参考输出，并且当所述参考输出与所述传感器的当前输出之间的差异超过阈值时被配置为产生指示信号。

公开(公告)号：EP2800132B1

公开(公告)日：2017-06-28

申请号：EP14166341.9

申请日：2014-04-29

Applicant: Globalfoundries Inc.

Inventor： Miner, Stephen Bradley ,  Fosnight, William John ,  Gallagher, Ryan

IPC: H01L21/67 ,  H01L21/68 ,  B25J19/02

CPC classification number: H01L21/67265 ,  G05B19/4184 ,  G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  H01L21/67259 ,  H01L21/67389 ,  H01L21/68 ,  H01L21/68707 ,  Y02P90/04 ,  Y10S901/02 ,  Y10S901/27

公开(公告)号：EP3185282A1

公开(公告)日：2017-06-28

申请号：EP17155850.5

申请日：2014-04-29

Applicant: GLOBALFOUNDRIES INC.

Inventor： Miner, Stephen Bradley ,  Fosnight, William John ,  Gallagher, Ryan

IPC: H01L21/67 ,  H01L21/68 ,  B25J19/02

CPC classification number: H01L21/67265 ,  G05B19/4184 ,  G05B19/41875 ,  G05B2219/37224 ,  G05B2219/45031 ,  H01L21/67259 ,  H01L21/67389 ,  H01L21/68 ,  H01L21/68707 ,  Y02P90/04 ,  Y10S901/02 ,  Y10S901/27

Abstract: Systems, machines, and methods for monitoring wafer handling are disclosed herein. A system for monitoring wafer handling of an assembled wafer handling machine with a robotic arm capable of picking up and moving wafers comprises: a sensor capable of being secured to the assembled wafer handling machine and a controller in electronic communication with the sensor and including control logic. The control logic is configured to store a reference output of the sensor when the wafer handling machine is aligned and to generate an indication signal when a difference between the reference output and a current output of the sensor exceeds a threshold. Herein, the system is modular in nature and the controller is independent of an automation control module used to control movement of the robotic arm.

Abstract translation: 这里公开了用于监测晶片处理的系统，机器和方法。 一种用于利用能够拾取和移动晶片的机器人臂来监控组装的晶片处理机器的晶片处理的系统包括：传感器，其能够被固定到组装的晶片处理机器;以及控制器，其与传感器进行电子通信并且包括控制逻辑 。 控制逻辑被配置成当晶圆处理机对准时存储传感器的参考输出，并且当参考输出与传感器的电流输出之间的差异超过阈值时产生指示信号。 在此，系统本质上是模块化的，并且控制器独立于用于控制机器人臂的移动的自动化控制模块。