公开(公告)号：US09711422B2

公开(公告)日：2017-07-18

申请号：US14821201

申请日：2015-08-07

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Stephen P. Ayotte ,  David J. Hill ,  John T. Kinnear, Jr. ,  Glen E. Richard ,  Timothy M. Sullivan ,  Heather M. Truax

IPC: G08B21/00 ,  H01L21/66 ,  G01R31/00

CPC classification number: H01L22/24 ,  G01R31/002 ,  H01L2924/0002 ,  Y10T29/49124 ,  H01L2924/00

Abstract: Methods and structures provide an electrostatic discharge (ESD) indicator including an electric field sensitive material configured to undergo a specific color change in response to an electric field. An exposure of the structure to an ESD can be visually determined via the specific color change of the ESD indicator.