公开(公告)号：US20210233800A1

公开(公告)日：2021-07-29

申请号：US17229017

申请日：2021-04-13

Applicant: Guangdong University of Technology

Inventor： Jian GAO ,  Wenxiu LAI ,  Guocong CHEN ,  Lanyu ZHANG ,  Yachao LIU ,  Yongbin ZHONG ,  Yuheng LUO ,  Huawen LIN

IPC: H01L21/687 ,  H01L21/68

Abstract: A decoupled XY parallel micro-positioning stage, including a central moving platform, fixed mechanisms, bridge-type micro-displacement amplification mechanisms, a four-bar symmetrical flexible guide mechanism and a piezoelectric ceramic. Each fixed mechanism is arranged between adjacent amplification mechanisms and is symmetrical about X and Y axes centered on the moving platform. The amplification mechanism is symmetrically arranged with respect to the X and Y axes, and includes two first and second longitudinal beams and multiple crossbeams. The two first longitudinal beams are provided in parallel and spaced apart. The two second longitudinal beams are arranged spaced apart between the two first longitudinal beams, and are connected to the two first longitudinal beams via the crossbeams. The crossbeams are connected to the longitudinal beams via a flexible hinge. The piezoelectric ceramic is arranged between the two first longitudinal beams.

公开(公告)号：US20240176315A1

公开(公告)日：2024-05-30

申请号：US18430513

申请日：2024-02-01

Applicant: GUANGDONG UNIVERSITY OF TECHNOLOGY

Inventor： Lanyu ZHANG ,  Boyu ZHAN ,  Jian GAO ,  Yachao LIU ,  Yun CHEN ,  Xin CHEN ,  Nan HUANG ,  Huake WANG ,  Xuanzhu CHEN

IPC: G05B13/04 ,  H02P25/06

CPC classification number: G05B13/042 ,  G05B13/048 ,  H02P25/06

Abstract: A linear motor motion control method, device, equipment and storage medium. The proposed invention uses an extended state observer constructed in advance based on the model parameters of the linear motor, and performs state estimation based on the total control amount of the linear motor and the actual displacement signal to obtain each observation signal. The phase advance controller is used to improve the estimated lag of the disturbance observation signal, and a model prediction controller built in advance based on the mathematical model of the linear motor is used to perform rolling optimization based on each observation signal to obtain the optimal control amount increment; The total control amount is updated based on the improved disturbance observation signal and the optimal control amount increment, and the corresponding drive signal is output to the drive end of the linear motor based on the updated total control amount.