公开(公告)号：US20190174614A1

公开(公告)日：2019-06-06

申请号：US16268703

申请日：2019-02-06

Applicant: Gigaphoton Inc.

Inventor： Fumio IWAMOTO ,  Tsukasa HORI ,  Toshiyuki HIRASHITA

IPC: H05G2/00

Abstract: An extreme ultraviolet light generation device may include a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated, and a target supply unit configured to eject a target into the chamber. The target supply unit may be provided with a nozzle member including an ejection face having an ejection port configured to eject the target into the chamber. An angle θ1 defined by the ejection face and the gravity axis may satisfy a condition of “0 degrees

公开(公告)号：US20180160519A1

公开(公告)日：2018-06-07

申请号：US15888110

申请日：2018-02-05

Applicant: Gigaphoton Inc.

Inventor： Fumio IWAMOTO ,  Tsukasa HORI ,  Toshiyuki HIRASHITA

IPC: H05G2/00

CPC classification number: H05G2/006 ,  H05G2/00 ,  H05G2/005 ,  H05G2/008

Abstract: An extreme ultraviolet light generation device may include a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated, and a target supply unit configured to eject a target into the chamber. The target supply unit may be provided with a nozzle member including an ejection face having an ejection port configured to eject the target into the chamber. An angle θ1 defined by the ejection face and the gravity axis may satisfy a condition of “0 degrees

公开(公告)号：US20190237303A1

公开(公告)日：2019-08-01

申请号：US16379539

申请日：2019-04-09

Applicant: Gigaphoton Inc.

Inventor： Fumio IWAMOTO ,  Yutaka SHIRAISHI ,  Tsukasa HORI ,  Osamu WAKABAYASHI

IPC: H01J37/32 ,  H05G2/00

CPC classification number: H01J37/32449 ,  H05G2/00 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.

公开(公告)号：US20160192470A1

公开(公告)日：2016-06-30

申请号：US15062896

申请日：2016-03-07

Applicant: Gigaphoton Inc.

Inventor： Fumio IWAMOTO ,  Yutaka SHIRAISHI ,  Tsukasa HORI ,  Takuya ISHII

IPC: H05G2/00

CPC classification number: H05G2/008 ,  G03F7/70908 ,  H05G2/005

Abstract: An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of greater than 90 degrees with the target.

Abstract translation: 极紫外光发生装置可以包括：当在室内的激光束照射靶时在其中产生极紫外光的室; 目标供给部构造成将所述目标物供给到所述室内; 以及目标集电器，其被配置为将目标供给部提供但不被激光束照射的目标物收集在收集容器中，通过在具有大于90度的接触角的接收表面上接收目标， 。

公开(公告)号：US20160037616A1

公开(公告)日：2016-02-04

申请号：US14879754

申请日：2015-10-09

Applicant: Gigaphoton Inc.

Inventor： Takashi SAITO ,  Fumio IWAMOTO ,  Osamu WAKABAYASHI ,  Takayuki YABU

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006

Abstract: An extreme ultraviolet light generation apparatus includes a target supplier configured to output a target into a chamber as a droplet, the target generating extreme ultraviolet light when being irradiated with a laser beam in the chamber; a droplet measurement unit configured to measure a parameter for a state of the droplet outputted into the chamber; a pressure regulator configured to regulate a pressure in the target supplier in which the target is accommodated; and a target generation controller configured to control the pressure regulator, based on the parameter measured by the droplet measurement unit.

Abstract translation: 一种极紫外光发生装置，具备将目标物作为液滴输出到室内的目标供给装置，在所述室内照射激光时产生极紫外光; 液滴测量单元，被配置为测量输出到所述室中的液滴的状态的参数; 压力调节器，被配置为调节所述目标供应器中容纳所述目标的压力; 以及目标产生控制器，其被配置为基于由所述液滴测量单元测量的参数来控制所述压力调节器。

公开(公告)号：US20230142875A1

公开(公告)日：2023-05-11

申请号：US17934469

申请日：2022-09-22

Applicant: Gigaphoton Inc.

Inventor： Fumio IWAMOTO ,  Yutaka SHIRAISHI

IPC: H05G2/00 ,  G01N21/88 ,  G03F7/20

CPC classification number: H05G2/006 ,  H05G2/008 ,  G01N21/88 ,  G03F7/70033 ,  G03F7/70608

Abstract: An EUV light generation apparatus to generate EUV light by irradiating a target with pulse laser light to turn the target into plasma includes a chamber, a target supply unit configured to supply the target to a plasma generation region in the chamber, a pulse laser device configured to generate pulse laser light to be radiated to the target, and a processor configured to change a generation frequency of the target generated by the target supply unit to a natural number multiple of an irradiation frequency of the pulse laser light based on a size of the target or related information related to the size of the target.

公开(公告)号：US20220110204A1

公开(公告)日：2022-04-07

申请号：US17465595

申请日：2021-09-02

Applicant: Gigaphoton Inc.

Inventor： Fumio IWAMOTO

IPC: H05G2/00 ,  G03F7/20

Abstract: An extreme ultraviolet light generation apparatus may include a chamber; a droplet generator configured to sequentially supply a first droplet of target substance to a plasma generation region in the chamber; and a gas flow generation device having a gas outlet for causing gas to flow along a travel direction of the first droplet around at least a part of a trajectory of the first droplet. Here, the droplet generator includes a vibrating element configured to generate, by applying vibration to a nozzle through which the target substance is output, a plurality of second droplets each having smaller volume than the first droplet and to cause the second droplets to be combined to generate the first droplet, and the gas outlet is located downstream, on a trajectory direction of the first droplet, of a position where the second droplets are combined and the first droplet is generated.

公开(公告)号：US20160270199A1

公开(公告)日：2016-09-15

申请号：US15161628

申请日：2016-05-23

Applicant: GIGAPHOTON INC.

Inventor： Fumio IWAMOTO ,  Takashi SAITO ,  Tsukasa HORI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/005

Abstract: An aspect of the present disclosure may include a gas lock cover secured to a nozzle holder and provided downstream of a nozzle. The gas lock cover may cover a periphery of an exit of the nozzle and be structured to guide gas supplied from a gas supply unit. The gas lock cover may include a hollow cylindrical part provided downstream of the nozzle and having an exit opening for outputting droplets that are outputted from the nozzle and pass through an internal cavity of the cylindrical part. The gas lock cover may include a channel for transmitting the gas supplied from the gas supply unit, the channel being structured to orient a flow of the transmitted gas so as to flow to the exit opening of the cylindrical part through the internal cavity of the cylindrical part.

Abstract translation: 本公开的一个方面可以包括固定到喷嘴保持器并设置在喷嘴下游的气体锁盖。 气体锁定盖可以覆盖喷嘴的出口的周边，并被构造成引导从气体供应单元供应的气体。 气体锁定盖可以包括设置在喷嘴下游的中空圆柱形部分，并且具有用于输出从喷嘴输出并穿过圆柱形部分的内部空腔的液滴的出口。 气体锁定盖可以包括用于传送从气体供应单元供应的气体的通道，该通道被构造成使透过气体的流动定向，以便通过圆筒形的内部空腔流到圆柱形部分的出口 部分。

公开(公告)号：US20160227638A1

公开(公告)日：2016-08-04

申请号：US15096769

申请日：2016-04-12

Applicant: GIGAPHOTON INC.

Inventor： Tsukasa HORI ,  Fumio IWAMOTO ,  Hiroshi UMEDA

IPC: H05G2/00

CPC classification number: H05G2/006 ,  H05G2/005 ,  H05G2/008

Abstract: In an example of the present invention is an extreme ultraviolet light generation apparatus including: a droplet supply device configured to successively supply droplets; a charging electrode being configured to control charging of droplets supplied from the droplet supply unit; and a target controller configured to control electric polarities of the droplets supplied from the droplet supply unit by controlling potential of the charging electrode in such a way that successive droplets join together to become a target droplet, wherein the droplets controlled in charging by the charging electrode include a plurality of groups each composed of successive droplets, and, in each of the groups, a droplet at one end is charged positively or negatively, a droplet at the other end is uncharged or charged in a polarity being the same as a polarity of an adjacent droplet in a group adjacent to the droplet at the other end.

Abstract translation: 本发明的一个实例是一种极紫外光发生装置，包括：液滴供给装置，被配置为连续供应液滴; 充电电极被配置为控制从液滴供应单元供应的液滴的充电; 以及目标控制器，其被配置为通过控制充电电极的电位来控制从液滴供给单元提供的液滴的电极性，使得连续的液滴接合在一起成为目标液滴，其中通过充电电极控制的液滴 包括多个由连续的液滴组成的组，并且在每个组中，一端的液滴是正或负的，另一端的液滴不带电或充电，极性与极性相同 在另一端与液滴相邻的组中的相邻液滴。

公开(公告)号：US20190150261A1

公开(公告)日：2019-05-16

申请号：US16244492

申请日：2019-01-10

Applicant: Gigaphoton Inc.

Inventor： Kazukiyo KAMIKANNA ,  Fumio IWAMOTO

IPC: H05G2/00

CPC classification number: H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: A droplet collection device may include a collecting container, a collision plate arranged in the collecting container and configured such that a droplet supplied from the opening to the collecting container is to collide with the collision plate, and a buffer member arranged on an opening side with respect to the collision plate and configured to mitigate impact of the droplet colliding with the collision plate. The buffer member may have a wire rod bundle configured such that multiple wire rods are bundled and fixed to a plate member. The wire rods may be made of carbon, and the plate member may be made of graphite. The wire rods may be fixed to the plate member with a graphitized adhesive with the wire rods being arranged in one direction.