公开(公告)号：US20230268710A1

公开(公告)日：2023-08-24

申请号：US18310089

申请日：2023-05-01

Applicant: Gigaphoton Inc.

Inventor： Youichi YAMANOUCHI ,  Hiroshi UMEDA ,  Kazuki NAGAI ,  Takeshi UEYAMA

IPC: H01S3/0977 ,  H01S3/097

CPC classification number: H01S3/0977 ,  H01S3/09702

Abstract: A gas laser apparatus according to an aspect of the present disclosure includes a main discharge circuit that supplies main discharge voltage that causes main discharge to a pair of main discharge electrodes, and a pre-ionization circuit that supplies pre-ionization voltage that causes corona discharge to a pre-ionization electrode. The main discharge circuit includes a step-up pulse transformer, a main capacitor and a switch connected to a primary side of the step-up pulse transformer, a first power source that charges the main capacitor, a first capacitor connected in parallel to a secondary side of the step-up pulse transformer, a first magnetic switch connected to the first capacitor, and a peaking capacitor connected in parallel to the first capacitor through the first magnetic switch and to the main discharge electrodes. An interval between start timings of the corona discharge and the main discharge is 30 ns to 60 ns inclusive.

公开(公告)号：US20240405501A1

公开(公告)日：2024-12-05

申请号：US18799432

申请日：2024-08-09

Applicant: Gigaphoton Inc.

Inventor： Youichi YAMANOUCHI ,  Hiroshi UMEDA ,  Takeshi UEYAMA

IPC: H01S3/0975 ,  H01S3/097

Abstract: A gas laser device includes a chamber configured to enclose a laser gas as including a pair of discharge electrodes having a longitudinal direction oriented along a predetermined direction and facing each other with a space therebetween; a plurality of capacitors arranged along the predetermined direction, each of the capacitors having one terminal electrically connected to one of the discharge electrodes and the other terminal electrically connected to the other of the discharge electrodes; and first and second magnetic switches each electrically connected to the one discharge electrode and the one terminal of each of the capacitors and electrically connected to each other in parallel. The second magnetic switch is arranged closer to a center of the one discharge electrode in the predetermined direction than the first magnetic switch, and a Vt product of the first magnetic switch is smaller than a Vt product of the second magnetic switch.