公开(公告)号：EP4450956A1

公开(公告)日：2024-10-23

申请号：EP23202329.1

申请日：2023-10-09

Applicant: GlobalFoundries U.S. Inc.

Inventor： Kalaparthi, Vivekanand ,  Costin, Keyden

IPC: G01N21/88 ,  G01N21/95 ,  H01L21/67 ,  H01L21/66

Abstract: A system for imaging a substrate, including a single electromagnetic radiation (EMR) emitter at a first side of the substrate. The system further includes a diffuser between the single EMR emitter and the substrate, the electromagnetic radiation from the single EMR emitter passing through the diffuser to a surface of the substrate. The system includes a photodetector at a second side of the substrate, the photodetector configured to capture reflected electromagnetic radiation from the surface of the substrate. The system further includes a computing device configured to render a single image of substantially an entirety of the surface of the substrate from the captured reflected electromagnetic radiation. The single EMR emitter and the photodetector are at an angle relative to the surface of the substrate that is not one of parallel and perpendicular.