STABILIZED LIGHT SOURCE
    5.
    发明专利

    公开(公告)号:JPH0334484A

    公开(公告)日:1991-02-14

    申请号:JP16871789

    申请日:1989-06-30

    Abstract: PURPOSE:To realize frequency stability even in a long wavelength band by a method wherein a light from a semiconductor light-emitting element is made to branch into an output light and a light to be detected, the latter is transformed into a transformed wavelength light of a shorter wave length, a change in the wavelength of the transformed light is detected and a control is made on the basis of a detection output so that an oscillation wavelength of the element be a prescribed one. CONSTITUTION:A semiconductor laser 1 as a light source outputs a laser light L0, which is made to branch into a stabilized output light L1 and a light L2 to be detected, by a half mirror MM. The light L2 to be detected is inputted to a wavelength transformation element 2 and it is turned thereby into a transformed wavelength light L3 of a wavelength of 1/2 and made to enter a wavelength change detector 3. The detector 3 can be constructed of a hollow cathode lamp utilizing a photo-galvanic effect and can convert a minute change in the wavelength into an electric change. This detection output is given to a drive current source 5 through the intermediary of a detecting element 4, a negative feedback is applied to a drive current of the semiconductor laser 1, and an oscillation wavelength can be controlled by controlling the drive current. A temperature control element 6 controls the temperature of the semiconductor laser 1. By the above constitution, high frequency stability can be realized.

    DISCHARGE TUBE FOR ULTRAVIOLET LIGHT SOURCE

    公开(公告)号:JPS61294752A

    公开(公告)日:1986-12-25

    申请号:JP13565585

    申请日:1985-06-21

    Inventor: AKAI YOSHIRO

    Abstract: PURPOSE:To maintain good light transmission characteristic even at such wavelength region as shorter than 250nm and longer side while employing conventional pipe material such as fused silicon or synthetic silicon by coating alphaAl2O3 thin film onto the inner face of discharge tube container. CONSTITUTION:Organic metal compound of aluminum, complex to be shown by Al(OR)n(OR')3-n, Al(OR)3, Al(R)3O2# >, organic solvent solution such as alcohlate acetylacetonate where the concentration of Al is 0.5-10wt% is applied onto the inner face of the section 1B which is utilized as the discharge tube container of discharge container element assembly 10 then dried. Organic solvent is removed under low temperature (lower than 100 deg.C) then burnt for 30-60min under the air or oxygen with the temperature higher than 500 deg.C to produce Al2O3 film. Then the temperature for producing alphaAl2O3 is increased to 1,000-1,100 deg.C to lead in steam for 30-60min. Thereafter, supply of steam is stopped to perform thermal processing under same temperature for 30-60min to complete alpha alpha-process.

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