Method and apparatus for substrate stripping

    公开(公告)号:AU2015308138A1

    公开(公告)日:2017-03-16

    申请号:AU2015308138

    申请日:2015-08-26

    Abstract: Methods and apparatus for stripping away portions of substrate are disclosed herein. In some embodiments, a flexible and/or soft impact-element(s) rotates around a rotation axis to drive a peripheral portion across a substrate plane of the substrate and/or to repeatedly collide with the substrate. At least some of the collisions are effective to partially dislodge or to strip away portion(s) of substrate.

    Method and apparatus for substrate stripping

    公开(公告)号:AU2015308138B2

    公开(公告)日:2020-05-21

    申请号:AU2015308138

    申请日:2015-08-26

    Abstract: Methods and apparatus for stripping away portions of substrate are disclosed herein. In some embodiments, a flexible and/or soft impact-element(s) rotates around a rotation axis to drive a peripheral portion across a substrate plane of the substrate and/or to repeatedly collide with the substrate. At least some of the collisions are effective to partially dislodge or to strip away portion(s) of substrate.

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