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公开(公告)号：EP0752583A4
公开(公告)日：1997-05-07
申请号：EP95903937
申请日：1994-12-22
Applicant: HOECHST AG
Inventor： TAKANO YUSUKE , OGURA SHIZUO , SUGIYAMA TSUNETOSHI
IPC: G01N21/88 , G01N21/956 , G01R31/309 , G01R33/00
CPC classification number: G01N21/88 , G01N21/956 , G01R31/309
Abstract: A detector for noncontact detection of defects in narrow wiring conductors. This detector includes an optical sensor, a sensor head and a signal processing unit. The optical sensor includes a transparent substrate, a transparent electrode disposed on the transparent substrate, a thin film of a nonlinear optical polymer disposed on the transparent electrode, and a reflecting film disposed on the thin film, and when used it is disposed very close to the electrode of the wiring substrate to be measured. The sensor head includes a light source, optical means for introducing light from the light source to the optical sensor, and detection means for detecting reflected light from the optical sensor. The detection means supplies the signal processing unit with a signal corresponding to the intensity of reflected light when a voltage is applied to the electrode of the wiring substrate.
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公开(公告)号：DE69321191D1
公开(公告)日：1998-10-29
申请号：DE69321191
申请日：1993-11-11
Applicant: HOECHST AG
Inventor： LIU YUAN DR , PRASS WERNER DR , STEHLIN THOMAS DR , OGURA SHIZUO , MOTOSUGI KENJI , TOKIDA AKIHIKO DR , YAMAMOTO TETSU
Abstract: The present invention pertains to an optical sensor for detecting gaseous or liquid chemical species which comprises a sensing element having a thin film and means of measurement by interference enhanced reflection. The sensing element comprises preferably a flat light reflecting substrate and one or more transparent thin organic or inorganic films or high-polymer films that are formed on said substrate. The detection of the gaseous or liquid chemical species is effected by measuring the change in the light reflection characteristic of the sensing element on the basis of the swelling of the thin film or the change in its thickness or refractive index or the changes in both parameters. The invention concerns also an apparatus including such optical sensor for detecting the presence of a toxic, combustible or flammable gas, vapor or solvent, an alarm and/or a means of running on and off switches or pipelines.
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公开(公告)号：DE69321191T2
公开(公告)日：1999-04-29
申请号：DE69321191
申请日：1993-11-11
Applicant: HOECHST AG
Inventor： LIU YUAN DR , PRASS WERNER DR , STEHLIN THOMAS DR , OGURA SHIZUO , MOTOSUGI KENJI , TOKIDA AKIHIKO DR , YAMAMOTO TETSU
Abstract: The present invention pertains to an optical sensor for detecting gaseous or liquid chemical species which comprises a sensing element having a thin film and means of measurement by interference enhanced reflection. The sensing element comprises preferably a flat light reflecting substrate and one or more transparent thin organic or inorganic films or high-polymer films that are formed on said substrate. The detection of the gaseous or liquid chemical species is effected by measuring the change in the light reflection characteristic of the sensing element on the basis of the swelling of the thin film or the change in its thickness or refractive index or the changes in both parameters. The invention concerns also an apparatus including such optical sensor for detecting the presence of a toxic, combustible or flammable gas, vapor or solvent, an alarm and/or a means of running on and off switches or pipelines.
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