公开(公告)号：GB2301884A

公开(公告)日：1996-12-18

申请号：GB9511760

申请日：1995-06-06

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： DAENDLIKER RENE ,  GRAY SIMON ,  SCHNELL URBAN

IPC: G01B11/06 ,  G01B11/14 ,  H01L21/66 ,  G01B9/02

Abstract: A method and apparatus are disclosed for characterising a one or more layer thin film system on a substrate, in particular in respect of layer thickness and refractive index, and for measuring the distance between two surfaces, wherein at least one of the surfaces comprises a one- or multi-layer system, taking into account, and allowing rectification of, the phase contribution from the thin film stack, by interferometry, in particular by white-light channelled spectrum interferometry or multi-wavelength interferometry.