公开(公告)号：JPH09119812A

公开(公告)日：1997-05-06

申请号：JP14411296

申请日：1996-06-06

Applicant: HOLTRONIC TECHNOLOGIES LTD

Inventor： RUNE DANRIKEERU ,  YURUBA SHIYUNERU ,  SAIMON GUREI

IPC: G01B11/06 ,  G01B11/14 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To determine the refractive index and thickness of a layer accurately and simultaneously while avoiding measurement error of distance by providing a collimate means, a beam converging means, means for introducing the reflected beam toward a diffraction grating, an array for detecting the reflected and scattered beam, etc. SOLUTION: Light beam from a white light source 11 is collimated through a collimate lens 13 and condensed through a lens 14. The light beam passes through a prism 23 and introduced to the test surface 25 of a substrate 27. A beam splitter 19 introduces the reflected light beam to a diffraction grating 17 where the reflected light beam is scattered. The scattered light beam is focused through a lens onto a light detection array 21 comprising a large number of pixels. The light detection array 21 delivers a signal through an electronic control unit 31 to a computer 33 where the distance, refractive index, thickness of layer, contribution in phase from multilayer structure are calculated from the intensity distribution of light.