公开(公告)号：WO2007143464A3

公开(公告)日：2008-12-04

申请号：PCT/US2007069939

申请日：2007-05-30

Applicant: HONEYWELL INT INC ,  WOOD ROLAND A ,  COX JAMES A ,  HIGASHI ROBERT E ,  NUSSEIBEH FOUAD A

Inventor： WOOD ROLAND A ,  COX JAMES A ,  HIGASHI ROBERT E ,  NUSSEIBEH FOUAD A

IPC: G01J3/42

CPC classification number: G01J5/12 ,  G01J3/42 ,  G01J3/4532 ,  G01J5/02 ,  G01J5/023 ,  G01J5/08 ,  G01J5/0837 ,  G01J5/40 ,  G01J2005/0077

Abstract: A radiation sensor (200) that can operate in the THz regime comprising: a micro antenna (206), which may comprise a two-dimensional patterned thin-film metallizations on a thin dielectric pellicle fabricated by micro machining. of a silicon wafer; a thermally isolated microstructure (215); a coupling mechanism for coupling the energy from the micro antenna to the microstructure, the coupling mechanism providing high thermal isolation between the micro antenna and the microstructure; a temperature signal detector on the microstructure; and signal processing electronics for receiving the temperature signal and processing it into useful data.

Abstract translation: 一种能够以太赫兹状态工作的辐射传感器（200），包括：微天线（206），其可以包括通过微加工制造的薄介电薄膜上的二维图案化薄膜金属化。 的硅晶片; 热分离微结构（215）; 用于将来自微天线的能量耦合到微结构的耦合机构，所述耦合机构在微天线和微结构之间提供高热隔离; 微结构的温度信号检测器; 以及用于接收温度信号并将其处理成有用数据的信号处理电子装置。

公开(公告)号：WO2004042380A2

公开(公告)日：2004-05-21

申请号：PCT/US0334540

申请日：2003-10-30

Applicant: HONEYWELL INT INC

Inventor： COLE BARRETT E ,  HIGASHI ROBERT E ,  WOOD ROLAND A

IPC: G01N33/00 ,  G01N27/00

CPC classification number: G01N33/0016

Abstract: A low power gas sensor is provided for detecting one or more gases in a gas sample. The gas sensor includes a sensor for sensing a desired gas and a heater for heating the sensor. During operation, a controller provides power to the heater to heat the sensor to an operating temperature during a first period of time. Once at the operating temperature, the controller may read the sensor to determine a measure of the detected gas in the gas sample. Once a measurement is taken, and to conserve power, the controller removes the power to the heater allowing the heater and sensor to cool to at or near the ambient temperature for a second period of time. The second to period of time may be longer than the first period of time, and in some cases, substantially longer. In some embodiments, the sensor and heater may be thermally isolated from some or all of the remainder of the gas sensor, such as the sensor substrate. This may also help reduce the amount of power that is required to heat the heater and sensor to the operating temperature. The gas sensor of the present invention may be ideally suited for battery powered and/or wireless applications.

Abstract translation: 提供了一种用于检测气体样品中的一种或多种气体的低功率气体传感器。 气体传感器包括用于感测所需气体的传感器和用于加热传感器的加热器。 在操作期间，控制器为加热器提供电力，以在第一时间段内将传感器加热到工作温度。 一旦处于工作温度，控制器可以读取传感器以确定气体样品中检测到的气体的量度。 一旦进行了测量并节省电力，控制器将去除加热器的电源，使加热器和传感器在环境温度或接近环境温度下冷却第二个时间段。 第二次到第一时间可能会比第一个时间长，在某些情况下会更长。 在一些实施例中，传感器和加热器可以与诸如传感器基板的气体传感器的其余部分的一些或全部热隔离。 这也可以帮助减少将加热器和传感器加热到工作温度所需的功率。 本发明的气体传感器可以理想地适用于电池供电和/或无线应用。

公开(公告)号：WO2007025100A3

公开(公告)日：2007-04-26

申请号：PCT/US2006033173

申请日：2006-08-25

Applicant: HONEYWELL INT INC ,  GU YUANDONG ,  COLE BARRETT L ,  HIGASHI ROBERT E

Inventor： GU YUANDONG ,  COLE BARRETT L ,  HIGASHI ROBERT E

IPC: G01N25/48 ,  G01N33/00

CPC classification number: G01N25/4846 ,  G01N33/004 ,  Y02A50/244

Abstract: A gas sensor is provided for detecting one or more gases in a gas sample. The gas sensor includes a substrate, a solid electrolyte layer including lanthanum oxide for sensing carbon dioxide, a heating element thermally coupled to the solid electrolyte layer, and a controller coupled to the heating element and the solid electrolyte layer. The controller heats the heating element so that the solid electrolyte layer reaches an operating temperature. Methods of sensing carbon dioxide and humidity are also disclosed.

Abstract translation: 提供气体传感器用于检测气体样品中的一种或多种气体。 气体传感器包括基板，包括用于感测二氧化碳的氧化镧的固体电解质层，与固体电解质层热耦合的加热元件以及耦合到加热元件和固体电解质层的控制器。 控制器加热加热元件，使固体电解质层达到工作温度。 还公开了检测二氧化碳和湿度​​的方法。

公开(公告)号：WO2004048958A3

公开(公告)日：2005-10-20

申请号：PCT/US0338146

申请日：2003-11-25

Applicant: HONEYWELL INT INC

Inventor： COLE BARRETT E ,  HIGASHI ROBERT E

IPC: G01N27/00 ,  G01N27/414 ,  G01N27/12 ,  B81B3/00 ,  C01B31/02

CPC classification number: G01N27/4146 ,  Y10S977/953

Abstract: A sensor (14) having a nanotube (15) grown on and supported by thermal bimorph structures (11, 12). The nanotube (15) rests on a heat sink (13) during sensing gas or a liquid and is moved from the heat sink when the nanotube is heated to desorb gas or liquid from it. The heatsink (13) may function as a gate along with the bimorph structures (11, 12) as the other terminals of a transistor. Current-voltage and current-gate voltage characteristics may be obtained of the nanotube as a device like a transistor. These characteristics may provide information on a gas or liquid absorbed by the nanotube.

Abstract translation: 具有生长在热双压电晶体结构（11,12）上并由其支撑的纳米管（15）的传感器（14）。 在检测气体或液体期间，纳米管（15）放置在散热器（13）上，并且当加热纳米管以从其中解吸气体或液体时，其从散热器移动。 作为晶体管的其他端子，散热器（13）可以与双压电晶片结构（11,12）一起作为栅极。 作为像晶体管的器件，可以获得电流 - 电压和电流 - 栅极电压特性。 这些特性可以提供关于纳米管吸收的气体或液体的信息。

公开(公告)号：WO2005062005A9

公开(公告)日：2008-08-07

申请号：PCT/US2004037991

申请日：2004-11-12

Applicant: HONEYWELL INT INC ,  COLE BARRETT E ,  HIGASHI ROBERT E

Inventor： COLE BARRETT E ,  HIGASHI ROBERT E

IPC: G01J1/42

CPC classification number: G01J1/429

Abstract: A light detector having a cathode wafer, a cavity wafer and an anode wafer. The cathode wafer may be bonded to one side of the cavity wafer and the anode wafer may be bonded to another side of the cavity wafer. The cathode wafer may have numerous cathodes, the anode wafer numerous anodes and the cavity wafer numerous cavities which may be aligned on a one-to-one basis to form a wafer structure of a plurality of detectors which may be diced into separable detector chips. When there is a voltage potential across a cathode and an anode, and a gas such as Ne or the like in the cavity, a reception of light such as ultra violet may result in an electronic discharge between the cathode and anode of the light detector.

Abstract translation: 具有阴极晶片，空腔晶片和阳极晶片的光检测器。 阴极晶片可以结合到空腔晶片的一侧，并且阳极晶片可以结合到空腔晶片的另一侧。 阴极晶片可以具有许多阴极，阳极晶片许多阳极和空腔晶片可以在一对一的基础上对准多个空腔，以形成多个检测器的晶片结构，其可以切成可分离的检测器芯片。 当在阴极和阳极之间存在电压电势，并且在空腔中存在诸如Ne等的气体时，诸如紫外线的光的接收可导致光检测器的阴极和阳极之间的电子放电。

公开(公告)号：WO2007070336A2

公开(公告)日：2007-06-21

申请号：PCT/US2006046715

申请日：2006-12-07

Applicant: HONEYWELL INT INC ,  COLE BERRETT E ,  HIGASHI ROBERT E ,  BARTELS JAMES ,  PLANER NORM ,  SWENSON GREGG

Inventor： COLE BERRETT E ,  HIGASHI ROBERT E ,  BARTELS JAMES ,  PLANER NORM ,  SWENSON GREGG

IPC: G01J1/42 ,  H01J47/00

CPC classification number: G01J1/429 ,  G01J1/02 ,  G01J1/0271 ,  H01J47/02

Abstract: A light detector having spaced electrodes preset by pins or a spacer within a sealed enclosure. The detector may have a MEMS structure that is separate from the sealing of the enclosure. Further, the detector may have a lens for the transmission of light onto the elements. The lens may be coated to affect the amount of light admitted into the enclosure. Light detectable by the sensor may be ultra-violet.

Abstract translation: 光检测器，其具有由密封壳体内的引脚或间隔物预设的间隔电极。 检测器可以具有与外壳的密封分开的MEMS结构。 此外，检测器可以具有用于将光传输到元件上的透镜。 透镜可以被涂覆以影响进入外壳的光量。 由传感器检测到的光可以是紫外线。

公开(公告)号：WO2009023484A3

公开(公告)日：2009-07-02

申请号：PCT/US2008072266

申请日：2008-08-06

Applicant: HONEYWELL INT INC ,  LU SON T ,  HIGASHI ROBERT E ,  RIDLEY JEFFREY A

Inventor： HIGASHI ROBERT E ,  RIDLEY JEFFREY A

IPC: G01F1/68 ,  B32B27/34 ,  B81B7/00 ,  B81C1/00

CPC classification number: G01F1/6845 ,  G01F1/6842 ,  Y10T29/49002

Abstract: A flow sensor system and a method for fabricating the same. A substrate is provided, comprising a detector wafer upon which a flow sensor is formed. One or more shells can then be configured upon the substrate whose walls form a flow channel. The flow channel is fabricated directly upon the substrate in a manner that allows the flow channel to couple heat transfer directly to the flow sensor in order to eliminate the need for two or more different types of sacrificial layers during the fabrication of the flow sensor upon the substrate and in which the shell(s) is coupled with fluidic measurement to provide for the flow sensor.

Abstract translation: 流量传感器系统及其制造方法。 提供衬底，包括其上形成流量传感器的检测器晶片。 然后可以将一个或多个壳体配置在其壁形成流动通道的基底上。 流动通道以允许流动通道将热量传递直接耦合到流量传感器的方式直接在基底上制造，以便在流量传感器制造期间不需要两种或更多种不同类型的牺牲层 衬底，并且其中壳体与流体测量耦合以提供流量传感器。

公开(公告)号：WO2008089121A3

公开(公告)日：2008-12-18

申请号：PCT/US2008050963

申请日：2008-01-14

Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E

Inventor： HIGASHI ROBERT E

IPC: G01L21/10 ,  G01L11/00

CPC classification number: G01L21/10 ,  G01L11/002

Abstract: A system for determining a gas pressure or gauging a vacuum in a hermetically sealed enclosure. One or more heater structures and one or more temperature sensor structures situated on a substrate may be used in conjunction for measuring a thermal conductivity of a gas in the enclosure. Each heater has significant thermal isolation from each sensor structure. Electronics connected to each heater and sensor of their respective structures may provide processing to calculate the pressure or vacuum in the enclosure. The enclosure may contain various electronic components such as bolometers.

Abstract translation: 用于确定气密压力或测量密封外壳中的真空的系统。 位于基底上的一个或多个加热器结构和一个或多个温度传感器结构可以联合使用以测量外壳中的气体的热导率。 每个加热器都与每个传感器结构有很大的热隔离。 连接到各个结构的每个加热器和传感器的电子设备可以提供处理以计算外壳中的压力或真空。 外壳可能含有各种电子元件，如辐射热测量计。

公开(公告)号：WO2005067047A3

公开(公告)日：2006-01-05

申请号：PCT/US2004042583

申请日：2004-12-08

Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E ,  RIDLEY JEFFREY A ,  NEWSTROM-PEITSO KAREN M

Inventor： HIGASHI ROBERT E ,  RIDLEY JEFFREY A ,  NEWSTROM-PEITSO KAREN M

IPC: G01J5/20 ,  G02B5/28 ,  H01L27/00 ,  H01L27/146 ,  H01L31/0203 ,  H01L31/0216

CPC classification number: G01J5/20 ,  H01L27/14618 ,  H01L27/14625 ,  H01L27/14649 ,  H01L27/16 ,  H01L31/0203 ,  H01L31/02162 ,  H01L2924/0002 ,  Y10T428/24355 ,  H01L2924/00

Abstract: An integrated vacuum package having an added volume on a perimeter within the perimeter of a bonding seal between two wafers. The added volume of space may be an etching of material from the inside surface of the top wafer. This wafer may have vent holes that may be sealed to maintain a vacuum within the volume between the two wafers after the pump out of gas and air. The inside surface of the top wafer may have an anti-reflective pattern. Also, an anti-reflective pattern may be on the outside surface of the top wafer. The seal between the two wafers may be ring-like and have a spacer material. Also, it may have a malleable material such as solder to compensate for any flatness variation between the two facing surfaces of the wafers.

Abstract translation: 在两片晶片之间的接合密封的周边周边上具有相加体积的集成真空包装。 增加的空间体积可以是从顶部晶片的内表面蚀刻材料。 该晶片可以具有通气孔，其可以在泵离开气体和空气之后被密封以将真空保持在两个晶片之间的体积内。 顶部晶片的内表面可以具有抗反射图案。 此外，抗反射图案可以在顶部晶片的外表面上。 两个晶片之间的密封可以是环状的并且具有间隔物材料。 此外，它可以具有可延展的材料，例如焊料，以补偿晶片的两个相对表面之间的任何平坦度变化。

公开(公告)号：WO2008100838A3

公开(公告)日：2009-01-08

申请号：PCT/US2008053538

申请日：2008-02-11

Applicant: HONEYWELL INT INC ,  HIGASHI ROBERT E

Inventor： HIGASHI ROBERT E

IPC: B81B3/00

CPC classification number: B81B3/0081 ,  B01L3/5027 ,  B01L3/502707 ,  B01L2200/14 ,  B01L2300/0627 ,  B01L2300/0816 ,  B01L2300/1827 ,  B81B2201/051 ,  B81B2201/058 ,  G01N30/6095 ,  G01N2030/025

Abstract: Embodiments of the invention relate to a fluid containment structure for a micro analyzer comprising one or more shelled thermal structures in contact with a thermally isolated component of the analyzer and wherein the shelled thermal structure comprises a conformal film and also comprises three walls of a channel and the thermally isolated component forms the fourth wall.

Abstract translation: 本发明的实施例涉及一种用于微分析器的流体容纳结构，其包括与分析仪的热隔离部件接触的一个或多个外壳热结构，并且其中所述带壳热结构包括保形膜，并且还包括三个通道壁和 热隔离部件形成第四壁。