公开(公告)号：EP3161511A4

公开(公告)日：2018-02-21

申请号：EP14895793

申请日：2014-06-27

Applicant: HRL LAB LLC

Inventor： SAYYAH KEYVAN ,  PATTERSON PAMELA R ,  EFIMOV OLEG M

IPC: G01S7/481 ,  G01S7/48 ,  G01S17/32 ,  G01S17/89

CPC classification number: G01S7/4817 ,  G01S7/4808 ,  G01S17/02 ,  G01S17/325 ,  G01S17/89 ,  H01S5/021 ,  H01S5/0215 ,  H01S5/0262 ,  H01S5/12

Abstract: A chip-scale scanning lidar includes a two dimensional (2D) scanning micromirror for a transmit beam and a 2D scanning micromirror for a receive beam, a laser diode and a photodetector, a first waveguide and first grating outcoupler coupled to a front facet of the laser diode, a second waveguide and a second grating outcoupler coupled to a rear facet of the laser diode on a substrate. A first fixed micromirror, a second micromirror, a third micromirror, and a focusing component are in a dielectric layer bonded to the substrate over the laser diode and photodetector. The photodetector is optically coupled to the second fixed micromirror and the third fixed micromirror for coherent detection.