公开(公告)号：AU6931700A

公开(公告)日：2001-05-08

申请号：AU6931700

申请日：2000-08-23

Applicant: HRL LAB LLC

Inventor： HSU TSUNG-YUAN ,  LOO ROBERT Y ,  TANGONAN GREG ,  LAM JUAN F

IPC: B81B3/00 ,  H01H1/00 ,  H01H35/00 ,  H01H47/22 ,  H01H47/24 ,  H01H59/00 ,  H01H67/22

Abstract: An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.