RF DISCHARGE SUPPRESSION IN LOW PRESSURE GAS DEVICES
    1.
    发明申请
    RF DISCHARGE SUPPRESSION IN LOW PRESSURE GAS DEVICES 审中-公开
    低压气体装置中的射频放电抑制

    公开(公告)号:WO1987003146A1

    公开(公告)日:1987-05-21

    申请号:PCT/US1986002299

    申请日:1986-10-28

    CPC classification number: H01S3/0315 H01S3/038 H01S3/0975

    Abstract: An RF laser structure (10) which includes an elongated laser excitation cavity (27) and an electrode structure (20) for suppressing extraneous RF discharges outside of the laser cavity. The electrode structure includes an electrode (41) adjacent the elongated laser cavity (27) and extending along the laser cavity; a conductive structure (43, 45) adjacent and conductively coupled to the electrode (41) for shielding the electrode and for providing smooth conductive surfaces; and a dielectric filler (47) encapsulating the electrode and the conductive structure, and for controlling the electric field generated by the electrode structure so that extraneous discharges are suppressed. Also disclosed is a method for making a laser electrode structure which includes the steps of forming an electrode adjacent the elongated laser cavity, and encapsulating the electrode with a dielectric potting material.

    RF DISCHARGE SUPPRESSION IN LOW PRESSURE GAS DEVICES
    2.
    发明授权
    RF DISCHARGE SUPPRESSION IN LOW PRESSURE GAS DEVICES 失效
    低压气体装置中的射频放电抑制

    公开(公告)号:EP0244474B1

    公开(公告)日:1991-05-22

    申请号:EP86907067.2

    申请日:1986-10-28

    CPC classification number: H01S3/0315 H01S3/038 H01S3/0975

    Abstract: An RF laser structure (10) which includes an elongated laser excitation cavity (27) and an electrode structure (20) for suppressing extraneous RF discharges outside of the laser cavity. The electrode structure includes an electrode (41) adjacent the elongated laser cavity (27) and extending along the laser cavity; a conductive structure (43, 45) adjacent and conductively coupled to the electrode (41) for shielding the electrode and for providing smooth conductive surfaces; and a dielectric filler (47) encapsulating the electrode and the conductive structure, and for controlling the electric field generated by the electrode structure so that extraneous discharges are suppressed. Also disclosed is a method for making a laser electrode structure which includes the steps of forming an electrode adjacent the elongated laser cavity, and encapsulating the electrode with a dielectric potting material.

    RF DISCHARGE SUPPRESSION IN LOW PRESSURE GAS DEVICES
    3.
    发明公开
    RF DISCHARGE SUPPRESSION IN LOW PRESSURE GAS DEVICES 失效
    RF减排在低气器件。

    公开(公告)号:EP0244474A1

    公开(公告)日:1987-11-11

    申请号:EP86907067.0

    申请日:1986-10-28

    IPC: H01S3

    CPC classification number: H01S3/0315 H01S3/038 H01S3/0975

    Abstract: Structure laser RF (10) comprenant une cavité allongée d'excitation laser (27) et une structure d'électrode (20) permettant de supprimer les décharges HF à l'extérieur de la cavité du laser. La structure d'électrode comporte une électrode (41) adjacente à la cavité allongée (27) du laser et s'étendant le long de cette cavité; une structure conductrice (43, 45) adjacente à l'électrode (41) et couplée à cette dernière de manière conductrice, afin de former un blindage pour l'électrode ainsi que des surfaces conductrices lisses; et un remplissage diélectrique (47) qui encapsule l'électrode et la structure conductrice, de manière à réguler le champ électrique produit par la structure d'électrode dans le but de supprimer toute décharge parasite. Est également décrit un procédé de fabrication d'une structure d'électrode de laser consistant à former une électrode à proximité de la cavité laser allongée, et à encapsuler l'électrode dans un matériau d'enrobage diélectrique .

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