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公开(公告)号:JPS5630765A
公开(公告)日:1981-03-27
申请号:JP8150180
申请日:1980-06-18
Applicant: IBM
Inventor: AANDORESU GIRIYAAMOU FUOOTEINO , HENRII JIYON GEIPERU JIYUNIA , ROORENSU GURIFUISU HERAA , RONARUDO SHIRUBAAMAN
IPC: H01L21/822 , G11C11/56 , G11C17/00 , G11C17/12 , H01L21/225 , H01L21/82 , H01L21/8246 , H01L27/04 , H01L27/10 , H01L27/112 , H01L29/08 , H01L29/78