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公开(公告)号：DE1784457A1
公开(公告)日：1971-08-19
申请号：DE1784457
申请日：1968-08-10
Applicant: IBM
Inventor： BROSS ARTHUR , BARTON CROTTY ALAN
IPC: H01L21/00 , H01L21/301 , B28B11/14
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