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公开(公告)号：IT8021315D0
公开(公告)日：1980-04-11
申请号：IT2131580
申请日：1980-04-11
Applicant: IBM
Inventor： BETH ROTHMAN LAURA , ANTHONY TOTTA PAUL , FRANCIS WHITE JAMES
IPC: H01L21/306 , H01L21/027 , H01L21/28 , H01L21/285 , H01L21/338 , H01L23/485 , H01L
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