公开(公告)号：DE69522934T2

公开(公告)日：2002-04-04

申请号：DE69522934

申请日：1995-02-07

Applicant: IBM

Inventor： BOURGOIN MARIE ,  JOHNSON BRUCE ,  MICHEL BRUNO

IPC: G01B21/30 ,  G01B7/34 ,  G01L1/04 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q30/00 ,  G01Q60/04 ,  G01Q60/26 ,  G01Q60/30 ,  G01Q60/32 ,  G01Q60/34 ,  H01J37/28 ,  H01L21/66

Abstract: PCT No. PCT/EP95/00431 Sec. 371 Date Oct. 3, 1996 Sec. 102(e) Date Oct. 3, 1996 PCT Filed Feb. 7, 1995 PCT Pub. No. WO96/24819 PCT Pub. Date Aug. 15, 1996A new method and an apparatus for measuring the deflection of or the force exerted upon a cantilever-type micromechanical element is presented which is based on detecting radiation emitted from the gap between the cantilever (220) and a second surface (230, 231). The radiation, while occurring spontaneously at high frequencies when appropriately biasing the cantilever and the second surface by a voltage, can be enlarged by using external energy sources. The new method and apparatus is also applied to surface investigation, particularly to dopant profiling.

公开(公告)号：DE69522934D1

公开(公告)日：2001-10-31

申请号：DE69522934

申请日：1995-02-07

Applicant: IBM

Inventor： BOURGOIN MARIE ,  JOHNSON BRUCE ,  MICHEL BRUNO

IPC: G01B21/30 ,  G01B7/34 ,  G01L1/04 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q30/00 ,  G01Q60/04 ,  G01Q60/26 ,  G01Q60/30 ,  G01Q60/32 ,  G01Q60/34 ,  H01J37/28 ,  H01L21/66

Abstract: PCT No. PCT/EP95/00431 Sec. 371 Date Oct. 3, 1996 Sec. 102(e) Date Oct. 3, 1996 PCT Filed Feb. 7, 1995 PCT Pub. No. WO96/24819 PCT Pub. Date Aug. 15, 1996A new method and an apparatus for measuring the deflection of or the force exerted upon a cantilever-type micromechanical element is presented which is based on detecting radiation emitted from the gap between the cantilever (220) and a second surface (230, 231). The radiation, while occurring spontaneously at high frequencies when appropriately biasing the cantilever and the second surface by a voltage, can be enlarged by using external energy sources. The new method and apparatus is also applied to surface investigation, particularly to dopant profiling.