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公开(公告)号:DE3268139D1
公开(公告)日:1986-02-06
申请号:DE3268139
申请日:1982-09-08
Applicant: IBM
Inventor: BJORKLUND GARY CARL , BRAUCHLE CHRISTOPHER R , BURLAND DONALD MAXWELL , HUNZIKER HEINRICH ERWIN , WILD URS PAUL
IPC: G03H1/02 , G03C1/73 , G03F7/00 , G03C1/72 , G03C1/71