公开(公告)号：DE2460989A1

公开(公告)日：1975-08-28

申请号：DE2460989

申请日：1974-12-21

Applicant: IBM

Inventor： BRUNNER ROLF HERBERT ,  CARBONE QUIEDO JOSEPH ,  LESTER WILLIAM CARL

IPC: C23C14/24 ,  C23C14/56 ,  H01L21/285 ,  C23C13/08 ,  H01B5/14 ,  H05K3/06

公开(公告)号：DE2513604A1

公开(公告)日：1975-12-11

申请号：DE2513604

申请日：1975-03-27

Applicant: IBM

Inventor： BRUNNER ROLF HERBERT ,  LESTER WILLIAM KARL

IPC: B23K35/40 ,  C23C14/50 ,  H01L21/285 ,  C23C13/08 ,  H01L21/30 ,  H05K3/16

Abstract: A coating apparatus, such as for vacuum deposition, in which an access port, of a deposition chamber, is provided with a hatch door having mounted on its inner surface workpiece supports adapted for turning on two mutually perpendicular axii within a stream of coating material. Included is a modification in which a plurality of supports are concentrically orbited about a third axis with the coating stream.