公开(公告)号：EP2024993A4

公开(公告)日：2011-08-10

申请号：EP07794523

申请日：2007-05-03

Applicant: IBM

Inventor： BUCCHIGNANO JAMES J ,  GIBSON GERALD W ,  ROTHWELL MARY B ,  YU ROY R

IPC: H01L21/768 ,  H01L21/311

CPC classification number: H01L21/31144 ,  H01L21/76802 ,  H01L21/76813

公开(公告)号：JPH11282166A

公开(公告)日：1999-10-15

申请号：JP1270699

申请日：1999-01-21

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレイション

Inventor： BUCCHIGNANO JAMES J ,  HUANG WU-SONG ,  KATNANI AHMAD D ,  LEE KIM Y ,  MOREAU WAYNE M ,  PETRILLO KAREN E

IPC: H01L21/027 ,  G03F7/004 ,  G03F7/039

CPC classification number: G03F7/039 ,  G03F7/0045 ,  Y10S430/106 ,  Y10S430/11 ,  Y10S430/111 ,  Y10S430/143

Abstract: PROBLEM TO BE SOLVED: To provide a chemical amplification resist exhibiting improved preservability of a resist coating and almost or completely free from the effect of vacuum in use by incorporating an aq. base-soluble polymer or copolymer having polar functional groups, a part of which is protected with specified cycloaliphatic ketal substituents.
SOLUTION: The chemical amplification resist contains an aq. base-soluble polymer or copolymer having polar functional groups, some of which are protected with cycloaliphatic ketal substituents represented by the formula RO-X-as acid decomposable protective groups, an acid generating agent, a solvent for the base-soluble polymer or copolymer, a base and, optionally, a surfactant. In the formula, X is an about 3-12C optionally substd. cycloaliphatic functional group and R is about 1-12C linear or branched alkyl or the like.
COPYRIGHT: (C)1999,JPO

Abstract translation: 要解决的问题：提供具有改进的抗蚀剂涂层保存性的化学放大抗蚀剂，几乎或完全没有真空在使用中的作用， 具有极性官能团的碱溶性聚合物或共聚物，其一部分用特定的脂环族缩酮取代基保护。 解决方案：化学增幅抗蚀剂含有水溶液。 具有极性官能团的碱溶性聚合物或共聚物，其中一些由式RO-X代表的脂环族缩酮取代基保护，作为酸可分解的保护基团，酸产生剂，用于碱溶性聚合物或共聚物的溶剂， 碱和任选的表面活性剂。 在该式中，X是约3-12C任选取代的。 脂环族官能团，R为约1-12个直链或支链烷基等。