Patent search ap:("IBM") AND inv:"BURKHART ROBERT WAYNE" Page 1

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发明专利
PROCESS FOR DEPOSITING FILMS ON BOTH SIDES OF A PLURALITY OF THIN SUBSTRATES 未知

公开(公告)号：DE3276439D1

公开(公告)日：1987-07-02

申请号：DE3276439

申请日：1982-11-23

Applicant: IBM

Inventor： BURKHART ROBERT WAYNE , COX ALLEN RONALD , HARTLEY JOHN DENNIS

IPC: C23C14/34 , C23C14/50 , G11B5/133 , G11B5/187 , G11B5/193

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