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公开(公告)号：DE2242138A1
公开(公告)日：1973-03-08
申请号：DE2242138
申请日：1972-08-26
Applicant: IBM
Inventor： BLUM JOSEPH MARTIN , BURSTELL CARL BERNARD , DEGELORMO JOSEPH FRANCIS , SHIH KWANG KUO
IPC: C30B19/00 , C30B19/06 , C30B19/10 , H01L21/00 , H01L21/208 , B01J17/06
