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公开(公告)号:DE1966236A1
公开(公告)日:1971-12-16
申请号:DE1966236
申请日:1969-07-29
Applicant: IBM
Inventor: CHARLES DUFFY MICHAEL , AUGUST SCHUMANN JUN PAUL , YEH TSU-HSING
IPC: H01L21/76 , H01L21/00 , H01L21/265 , H01L21/322 , H01L21/331 , H01L21/337 , H01L21/74 , H01L21/761 , H01L21/82 , H01L21/822 , H01L21/8222 , H01L27/00 , H01L27/04 , H01L29/08 , H01L29/167 , H01L29/73 , H01L29/808 , H01L7/54
Abstract: Monolithic integrated circuits are made utilizing various ion implantation techniques for making diodes, transistors, resistors, capacitors, underpass connections, sub-collector junctions, etc., and for altering impurity profiles, gold doping, trimming resistance values, altering junctions depth, and isolating regions.
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公开(公告)号:DE1966237A1
公开(公告)日:1972-01-13
申请号:DE1966237
申请日:1969-07-29
Applicant: IBM
Inventor: CHARLES DUFFY MICHAEL , AUGUST SCHUMANN JUN PAUL , YEH TSU-HSING
IPC: H01L21/76 , H01L21/00 , H01L21/265 , H01L21/322 , H01L21/331 , H01L21/337 , H01L21/74 , H01L21/761 , H01L21/82 , H01L21/822 , H01L21/8222 , H01L27/00 , H01L27/04 , H01L29/08 , H01L29/167 , H01L29/73 , H01L29/808 , H01L7/54
Abstract: Monolithic integrated circuits are made utilizing various ion implantation techniques for making diodes, transistors, resistors, capacitors, underpass connections, sub-collector junctions, etc., and for altering impurity profiles, gold doping, trimming resistance values, altering junctions depth, and isolating regions.
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公开(公告)号:DE1938365A1
公开(公告)日:1970-02-12
申请号:DE1938365
申请日:1969-07-29
Applicant: IBM
Inventor: CHARLES DUFFY MICHAEL , YEH TSU-HSING , AUGUST SCHUMANN JUN PAUL
IPC: H01L21/76 , H01L21/00 , H01L21/265 , H01L21/322 , H01L21/331 , H01L21/337 , H01L21/74 , H01L21/761 , H01L21/82 , H01L21/822 , H01L21/8222 , H01L27/00 , H01L27/04 , H01L29/08 , H01L29/167 , H01L29/73 , H01L29/808 , H01L7/54
Abstract: Monolithic integrated circuits are made utilizing various ion implantation techniques for making diodes, transistors, resistors, capacitors, underpass connections, sub-collector junctions, etc., and for altering impurity profiles, gold doping, trimming resistance values, altering junctions depth, and isolating regions.
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