HIGH FIELD CAPACITOR STRUCTURE EMPLOYING A CARRIER TRAPPING REGION

    公开(公告)号:CA1091312A

    公开(公告)日:1980-12-09

    申请号:CA299176

    申请日:1978-03-17

    Applicant: IBM

    Abstract: A high field capacitor structure includes an insulating layer having a carrier trapping region between two electrodes. The trapping region improves electric breakdown characteristics of the capacitor structure and is particularly useful in avoiding the low breakdown voltages and high leakage currents normally encountered in structures with asperities, such as SiO2 over poly Si. The trapping region can be formed by chemical vapor deposition (CVD) process, by evaporation or by ion implantation. The trapping region is close to the Si, but far enough away to eliminate the possibility of reverse tunneling from discharging the traps in the absence of an applied voltage.

    7.
    发明专利
    未知

    公开(公告)号:DE2805170A1

    公开(公告)日:1979-01-04

    申请号:DE2805170

    申请日:1978-02-08

    Applicant: IBM

    Abstract: A high field capacitor structure comprising: a pair of separate electrodes, and an insulating layer dispersed between said pair of electrodes, said insulating layer having a carrier capture region. (Machine-translation by Google Translate, not legally binding)

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