公开(公告)号：GB2575750B

公开(公告)日：2020-07-15

申请号：GB201915262

申请日：2018-04-10

Applicant: IBM

Inventor： EDWARD WILLIAM KIEWRA ,  JASON SCOTT ORCUTT ,  JOHN JOSEPH ELLIS-MONAGHAN

IPC: H01L31/0232 ,  H01L31/18

公开(公告)号：GB2575750A

公开(公告)日：2020-01-22

申请号：GB201915262

申请日：2018-04-10

Applicant: IBM

Inventor： EDWARD WILLIAM KIEWRA ,  JASON SCOTT ORCUTT ,  JOHN JOSEPH ELLIS-MONAGHAN

IPC: H01L31/0232 ,  H01L31/18

Abstract: A photo detector (10) including: a waveguide (12) of a waveguide material extending over a substrate (22), an insulating layer (26) formed over the waveguide (12) and having an opening (18) exposing the waveguide (12), a photo detector layer (16) formed over the insulating layer (26) and into the opening (18) so as to make contact with the waveguide (12), the photo detector layer 16 having a first end at the opening (18) and a second end distal from the opening (18), the photo detector layer (16) being a gradient material of the waveguide material and germanium wherein a waveguide material portion of the gradient material varies from a maximum at the first end to a minimum at the second end and wherein a germanium portion of the gradient material varies from a minimum at the first end to a maximum at the second end, a photo detector region at the second end, and a photo detector layer extension (30) extending at an angle from the photo detector layer (16) at the second end.