MICRO-ELECTROMECHANICAL INDUCTIVE SWITCH
    2.
    发明申请
    MICRO-ELECTROMECHANICAL INDUCTIVE SWITCH 审中-公开
    微机电感应开关

    公开(公告)号:WO2004078638A3

    公开(公告)日:2004-10-28

    申请号:PCT/US0334630

    申请日:2003-10-28

    Applicant: IBM

    Abstract: A micro-electromechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils (20, 30) on a moveable platform (15) and a second plurality of coils (40, 50) on a stationary platform or substrate, the coils on the moveable platform being above or below those in the stationary substrate. Coupling and decoupling occurs by rotating or by laterally displacing the coils of the moveable platform with respect to the coils on the stationary substrate. Diverse arrangements or coils respectively on the moveable and stationary substrates allow for a multi-pole and multi-position switching configurations. The MEM switches described eliminate problems of stiction, arcing and welding of the switch contacts. The MEMS switches of the invention can be fabricated using standard CMOS techniques.

    Abstract translation: 描述了能够感应耦合和去耦电信号的微机电(MEM)开关。 电感式MEM开关包括在可移动平台(15)上的第一组多个线圈(20,30)和固定平台或基板上的第二组多个线圈(40,50),可移动平台上的线圈位于 低于固定基板的。 通过旋转或相对于固定基板上的线圈横向移动可移动平台的线圈而发生耦合和去耦。 分别在可移动和固定基板上的不同布置或线圈允许多极和多位置切换配置。 所描述的MEM开关消除了开关触点的静电,电弧和焊接的问题。 本发明的MEMS开关可以使用标准CMOS技术制造。

    Micro-electromechanical inductive switch

    公开(公告)号:AU2003287361A8

    公开(公告)日:2004-09-28

    申请号:AU2003287361

    申请日:2003-10-28

    Applicant: IBM

    Abstract: A micro-electro mechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils on a movable platform and a second plurality of coils on a stationary platform or substrate, the coils on the movable platform being above or below those in the stationary substrate. Coupling and decoupling occurs by rotating or by laterally displacing the coils of the movable platform with respect to the coils on the stationary substrate. Diverse arrangements of coils respectively on the movable and stationary substrates allow for a multi-pole and multi-position switching configurations. The MEM switches described eliminate problems of stiction, arcing and welding of the switch contacts. The MEMS switches of the invention can be fabricated using standard CMOS techniques.

    MICRO-ELECTROMECHANICAL INDUCTIVE SWITCH

    公开(公告)号:AU2003287361A1

    公开(公告)日:2004-09-28

    申请号:AU2003287361

    申请日:2003-10-28

    Applicant: IBM

    Abstract: A micro-electro mechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils on a movable platform and a second plurality of coils on a stationary platform or substrate, the coils on the movable platform being above or below those in the stationary substrate. Coupling and decoupling occurs by rotating or by laterally displacing the coils of the movable platform with respect to the coils on the stationary substrate. Diverse arrangements of coils respectively on the movable and stationary substrates allow for a multi-pole and multi-position switching configurations. The MEM switches described eliminate problems of stiction, arcing and welding of the switch contacts. The MEMS switches of the invention can be fabricated using standard CMOS techniques.

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