Patent search ap:("IBM") AND inv:"GAIER CLAUDE E" Page 1

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发明专利
METHOD AND APPARATUS FOR OBTAINING OPTIMUM PHOSPHORUS CONCENTRATION IN SEMICONDUCTOR WAFERS 未知

公开(公告)号：CA948076A

公开(公告)日：1974-05-28

申请号：CA101102

申请日：1970-12-21

Applicant: IBM

Inventor： GAIER CLAUDE E , GROCHOWSKI EDWARD G , ROY MAURICE M

IPC: H01L21/22 , C30B31/16 , H01L21/00

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