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公开(公告)号：CH484523A
公开(公告)日：1970-01-15
申请号：CH1539468
申请日：1968-10-15
Applicant: IBM
Inventor： PAUL PHILIP CASTRUCCI , EDWARD GEORGE GROCHOWSKI , MARTIN STEVEN HESS , GEORGE MAHERAS , WILLIAM DAVID NORTH
IPC: H01L21/822 , H01L21/331 , H01L21/74 , H01L21/8222 , H01L27/00 , H01L27/04 , H01L29/04 , H01L29/73 , H01L19/00
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