公开(公告)号：JPH10227801A

公开(公告)日：1998-08-25

申请号：JP1536298

申请日：1998-01-28

Applicant: IBM

Inventor： GERT KARL BINICH ,  WARUTAA HEEBERURE

IPC: G01B21/30 ,  G01B5/28 ,  G01N37/00 ,  G01Q30/14

Abstract: PROBLEM TO BE SOLVED: To obtain an atomic force microscope which prevents the upper side of a cantilever from coming into contact with a fluid and which investigates the surface of a sample arranged inside the fluid by a method wherein the cantilever is separated from an adjacent flow limitation means by means of a gap. SOLUTION: An investigating/operating tool (a chip) 26 is attached to the first side of a cantilever 15, and it is immersed in a cantilever fluid 24 while a sample 30 is being investigated/operated. A positioning means 10 positions the chip 26 with reference to the sample 30. While the sample 30 is being investigated/operated, the second side of the cantilever 15 is not immersed in the fluid 24. That is to say, the cantilever 15 is separated from an adjacent flow limitation means 25 by means of a gap 27, and the fluid 24 does not flow through the gap 27. In addition, the fluid 24 does not flow through the gap 27 by a movable means 16 which is arranged inside the gap 27. In addition, the fluid 24 is provided with surface tension, and the surface tension prevents the fluid 24 from flowing through the gap 27. In addition, a sensing means 20 is arranged on the upper side of the cantilever 15.