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公开(公告)号:JPS54154283A
公开(公告)日:1979-12-05
申请号:JP4208979
申请日:1979-04-09
Applicant: IBM
Inventor: NARASHIPAA GANDATSUPA ANANSA , HAASARAN SHISO BATSUTEIA , SANTOSHIYU PURASADO GAUA , HANSU BAANAADO POTSUJI
IPC: H01L29/73 , H01L21/331 , H01L21/76 , H01L21/762 , H01L21/8224 , H01L27/082 , H01L29/08 , H01L29/735