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公开(公告)号：AU4164272A
公开(公告)日：1973-12-20
申请号：AU4164272
申请日：1972-04-27
Applicant: IBM
Inventor： HEGEDUS CORNEL LESLIE , VORA MADHUKAR BHAVANIDAS
IPC: H01L21/22 , H01L21/74 , H01L21/761 , H01L21/8238 , H01L21/8249 , H01L27/06
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