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公开(公告)号：IT8023526D0
公开(公告)日：1980-07-18
申请号：IT2352680
申请日：1980-07-18
Applicant: IBM
Inventor： SCHWUTTKE GUENTER H , HSIUNG YANG KUEI
IPC: H01L21/268 , H01L21/322 , H01L
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