-
公开(公告)号：FR2356453A1
公开(公告)日：1978-01-27
申请号：FR7716044
申请日：1977-05-17
Applicant: IBM
Inventor： CHAPPELOW RONALD E , HUNKELE HARRY J
IPC: C23C16/44 , C23C16/455 , C30B25/14 , C30B25/16 , H01L21/205 , B01J17/32
Search Results
1
records
(took 0.014 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
