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公开(公告)号：DE2726508A1
公开(公告)日：1978-01-05
申请号：DE2726508
申请日：1977-06-11
Applicant: IBM
Inventor： CHAPPELOW RONALD EDWARD , HUNKELE HARRY JOSEPH
IPC: C23C16/44 , C23C16/455 , C30B25/14 , C30B25/16 , H01L21/205 , C23C11/00 , B01J17/28 , B01J17/32 , H01L21/20
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