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公开(公告)号：JPS60124869A
公开(公告)日：1985-07-03
申请号：JP14981384
申请日：1984-07-20
Applicant: IBM
Inventor： NARASHIPAA GANDATSUPA ANANSA , SANTOSHIYU PURASADO GAUA , IISHIYOU HANGU , POORU JIYAAMIN TSUANGU
IPC: H01L29/73 , H01L21/331 , H01L21/8224 , H01L29/08 , H01L29/735
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