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公开(公告)号：JPS5591176A
公开(公告)日：1980-07-10
申请号：JP13431279
申请日：1979-10-19
Applicant: IBM
Inventor： JIEEMUZU ROBAATO KAADEINAA , UIRIAMU EARON PURISUKIN , MAATEIN REBITSUTSU , JIYOSEFU FURANSHISU SHIEPAADO
IPC: H01L29/78 , H01L21/033 , H01L21/28 , H01L21/336 , H01L29/417 , H01L29/778
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