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公开(公告)号：JPS57192081A
公开(公告)日：1982-11-26
申请号：JP20454381
申请日：1981-12-19
Applicant: IBM
Inventor： JIYAI PARU BANSARU , KURAUDE RUISU BAACHIN , RONARUDO ROI TORAUTOMAN
IPC: H01L27/00 , H01L21/268 , H01L21/8238 , H01L27/06 , H01L27/092 , H01L29/04 , H01L29/78 , H01L29/786
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