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公开(公告)号:CH447760A
公开(公告)日:1967-11-30
申请号:CH1534466
申请日:1966-10-21
Applicant: IBM
Inventor: FRED BARSON , JOHAN STURM
IPC: C23G5/00 , H01J9/233 , H01J37/34 , C23C15/00