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公开(公告)号：DE2361436A1
公开(公告)日：1974-06-12
申请号：DE2361436
申请日：1973-12-10
Applicant: IBM
Inventor： JOHNSON JUN CLAUD , PALMER MYRON DOUGLAS
IPC: G03C1/00 , G03F7/085 , G03F7/09 , G03F7/11 , H01L21/027 , H01L21/312 , C23F1/02
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