LASER FUSE STRUCTURES FOR HIGH POWER APPLICATIONS
    1.
    发明申请
    LASER FUSE STRUCTURES FOR HIGH POWER APPLICATIONS 审中-公开
    高功率应用的激光保险丝结构

    公开(公告)号:WO2007063044A3

    公开(公告)日:2007-11-08

    申请号:PCT/EP2006068939

    申请日:2006-11-27

    CPC classification number: H01L23/5258 H01L2924/0002 H01L2924/00

    Abstract: The present invention relates to a laser fuse structure for high power applications. Specifically, the laser fuse structure of the present invention comprises first and second conductive supporting elements (12a, 12b) , at least one conductive fusible link (14) , first and second connection elements (20a, 20b) , and first and second metal lines (22a, 22b) . The conductive supporting elements (12a, 12b) , the conductive fusible link (14) , and the metal lines (22a, 22b) are located at a first metal level (3) , while the connect elements (20a, 20b) are located at a second, different metal level (4) and are connected to the conductive supporting elements (12a, 12b) and the metal lines (22a, 22b) by conductive via stacks (18a, 18b, 23a, 23b) that extend between the first and second metal levels (3, 4).

    Abstract translation: 本发明涉及一种用于大功率应用的激光熔丝结构。 具体地,本发明的激光熔丝结构包括第一和第二导电支撑元件(12a,12b),至少一个导电熔丝(14),第一和第二连接元件(20a,20b)以及第一和第二金属线 (22a,22b)。 导电支撑元件(12a,12b),导电熔丝(14)和金属线(22a,22b)位于第一金属层(3)处,而连接元件(20a,20b)位于 第二不同的金属级(4),并且通过导电通孔叠层(18a,18b,23a,23b)与导电支撑元件(12a,12b)和金属线(22a,22b)连接, 第二金属含量(3,4)。

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